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M Tek
Spin Rinse Dryers
M Tek SRDs are available in Double Stack, Single Stack, and Benchtop Models
Anchor 1
S Model SRDs
Wafer/Cassette Size
300mm / 12" Low Profile &
200mm / 8" High Profile
200mm / 8" Low Profile
150mm / 6"
125mm / 5"
Double Stack
8300S
880S
870S
860S
Single Stack
4300S
480S
470S
460S
Benchtop
2300S
280S
270S
260S
100mm / 4"
840S
440S
240S
F Model
F Model SRDs
Wafer/Cassette Size
300mm / 12" Low Profile &
200mm / 8" High Profile
200mm / 8" Low Profile
150mm / 6"
125mm / 5"
Double Stack
8300F
880F
870F
860F
Single Stack
4300F
480F
470F
460F
Benchtop
2300F
280F
270F
260F
100mm / 4"
840F
440F
240F
ST Model
ST Model SRDs
Wafer/Cassette Size
300mm / 12" Low Profile &
200mm / 8" High Profile
200mm / 8" Low Profile
150mm / 6"
125mm / 5"
Double Stack
8300ST
880ST
870ST
860ST
Single Stack
4300ST
480ST
470ST
460ST
Benchtop
2300ST
280ST
270ST
260ST
100mm / 4"
840ST
440ST
240ST
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